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Research on the influence of aperture process defects on the measurement precision and accuracy of autocollimator and compensation methods

2026-03-22 Hits:

Journal:Optics Express

Indexed by:Journal paper

Document Type:J

Volume:32

Issue:(26)

Translation or Not:no

Date of Publication:2025-03-22

Included Journals:SCI

Date of Publication:2025-03-22

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黎人溥

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:ITMO University Academic Titles:专人教师 Other Post:无 Degree:Doctoral Degree in Engineering Status:在岗 School/Department:集成电路学院 Business Address:集成电路学院 Contact Information:18223340509 E-Mail:

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Research on the influence of aperture process defects on the measurement precision and accuracy of autocollimator and compensation methods